Superhard film-coated member and method of manufacturing the same

摘要

PCT No. PCT/JP93/01779 Sec. 371 Date Oct. 28, 1994 Sec. 102(e) Date Oct. 28, 1994 PCT Filed Dec. 8, 1993 PCT Pub. No. WO94/13852 PCT Pub. Date Jun. 23, 1994The present invention provides a superhard film-coated member having a diamond or diamond-like carbon film strongly bonded to a cemented carbide substrate and a method of manufacturing such a member. The cemented carbide substrate is subjected to heat treatment to cause the bonding metal in a region of the substrate near to its surface to migrate to the surface so as to form hemispherical deposits thereon. The deposits are left undisturbed or a part or all thereof are removed, and subsequently diamond and/or diamond-like carbon is grown on the substrate surface by a chemical vapor deposition process. The deposits formed on the substrate surface have the effect of significantly improving the bonding strength between the superhard films and the cemented carbide substrate to allow formation of thicker film coatings.