| 摘要 |
PROBLEM TO BE SOLVED: To attain a simple structure and easy maintenance, and prevent particles from scattering from the sliding mechanism of an arm. SOLUTION: This robot is provided with at least two hollow arms 20, 24 connected through a joint part 22, a bearing part and a power transmission part fitted on the arm, and an exhaust route for sucking particles from the bearing part or the power transmission part by exhausting air in the arm through the joint part. It is thus possible to suck and remove the particles generated at the bearing part and the power transmission part of an internal arm, without contaminating a space in a vacuum chamber used for the robot, in a route separated from the chamber or the like. |
