申请人 |
AKITA ELECTRONICS CO., LTD.;HITACHI ULSI SYSTEMS CO., LTD.;HITACHI, LTD. |
发明人 |
AKIYAMA YUKIHARU;KUDAISHI TOMOAKI;OHNISHI TAKEHIRO;SHIMADA NORIOU;EGUCHI SHUJI;NISHIMURA ASAO;ANJO ICHIRO;TSUBOSAKI KUNIHIRO;MIYAZAKI CHUICHI;KOYAMA HIROSHI;SHIBAMOTO MASANORI;NAGAI AKIRA;OGINO MASAHIKO |