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发明名称
FORMATION OF CN THIN FILM AND CN THIN FILM FORMING DEVICE
摘要
申请公布号
JPH11256334(A)
申请公布日期
1999.09.21
申请号
JP19980074928
申请日期
1998.03.09
申请人
ULVAC CORP;AGENCY OF IND SCIENCE & TECHNOL
发明人
KIUCHI MASATO;FUKAZAWA HIROYUKI;AGAWA YOSHIAKI;TERASAWA HISAHIRO
分类号
C23C14/06;C23C16/34;(IPC1-7):C23C16/34
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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