APPARATUS FOR PULLING SILICON SINGLE CRYSTAL,申请号JP19980059229-传众专利搜索

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发明名称	APPARATUS FOR PULLING SILICON SINGLE CRYSTAL
摘要
申请公布号	JPH11255590(A)	申请公布日期	1999.09.21
申请号	JP19980059229	申请日期	1998.03.11
申请人	MITSUBISHI MATERIALS SILICON CORP	发明人	FU SHINRIN;ONO NAOKI;KIDA MICHIO;SHIMANUKI YASUSHI
分类号	C30B15/14;C30B29/06;(IPC1-7):C30B15/14	主分类号	C30B15/14
代理机构		代理人
主权项
地址

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