发明名称 |
CVD method of depositing a plurality of polycrystalline diamond film layers |
摘要 |
A CVD method of forming a diamond coated article is disclosed, which consists essentially of a substrate and a plurality of polycrystalline diamond film layers accumulatively coated thereon in a total thickness of at least 20 mu m, wherein each of the polycrystalline diamond film layers (i) has a thickness of 6 to 13 mu m, (ii) has an average crystallite size in the surface direction thereof of 3 to 7 mu m, (iii) has (111) oriented diamond crystallites exposed on the surface thereof, and (iv) satisfies the relationship: I(N)/I(D)<0.2, wherein I(D) represents an intensity of diamond Raman peak in counts/sec appearing around 1333 cm-1 and I(N) represents a maximum intensity among non-diamond Raman peaks appearing between 1200 cm-1 and 1600 cm-1.
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申请公布号 |
US5955155(A) |
申请公布日期 |
1999.09.21 |
申请号 |
US19980168385 |
申请日期 |
1998.10.08 |
申请人 |
NGK SPARK PLUG CO., LTD. |
发明人 |
YAMAMOTO, HIROSHI;OKAMURA, TAKASHI;IIO, SATOSHI |
分类号 |
B23B27/14;B32B9/00;C23C16/26;C23C16/27;C23C16/50;C23C16/511;C23C28/00;C23C30/00;C30B29/04;(IPC1-7):B05D3/06 |
主分类号 |
B23B27/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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