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经营范围
发明名称
WAFER POLISHING MACHINE
摘要
申请公布号
JPH11254318(A)
申请公布日期
1999.09.21
申请号
JP19980071252
申请日期
1998.03.06
申请人
OKAMOTO MACHINE TOOL WORKS LTD
发明人
HAYASHI TOMOO
分类号
B24B41/047;(IPC1-7):B24B41/047
主分类号
B24B41/047
代理机构
代理人
主权项
地址
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