| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a low drive voltage exposure element being arrayed easily in which digital multiexposure can be carried out at high speed without using laser light causing cost increase. SOLUTION: A one-dimensional or two-dimensional matrix optical modulating section 14 for modulating the light from a plane light source of UV-rays optically through electromechanical operation is disposed on the plane light source. The optical modulating section 14 comprises a light introduction plate 1, a transparent signal electrode 3 arranged thereon, a transparent flexible thin film 9 disposed oppositely to the signal electrode 3 through an air gap 11, and a scanning electrode 13 arranged on the flexible thin film 9 while facing the signal electrode 3 wherein the flexible thin film 9 is flexed with Coulomb force generated by applying a voltage to the signal electrode 3 and the scanning electrode 13 thus modulating light transmitted through the flexible thin film 9.</p> |
