发明名称 |
Machine structures fabricated of multiple microstructure layers |
摘要 |
Machine structures each comprising a stack of a plurality of micromachine layers laminated together are presented, along with fabrication methods therefore. Each machine structure includes a movable member(s) defined from microstructure of at least one layer of the plurality of micromachine layers comprising the stack. During fabrication, the micromachine layers are separately formed using VLSI techniques and then subsequently laminated together in a selected arrangement in the stack to define the machine structure.
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申请公布号 |
US5955818(A) |
申请公布日期 |
1999.09.21 |
申请号 |
US19970999871 |
申请日期 |
1997.11.04 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BERTIN, CLAUDE LOUIS;CRONIN, JOHN EDWARD |
分类号 |
B81B5/00;B81B7/00;B81C1/00;B81C3/00;H01H1/00;H01L21/306;H01L29/84;H01L49/00;H02N1/00;(IPC1-7):H01L41/08 |
主分类号 |
B81B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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