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摘要
申请公布号
JP2951082(B2)
申请公布日期
1999.09.20
申请号
JP19910303830
申请日期
1991.10.24
申请人
TOSHIBA KK
发明人
MYAMOTO JUNICHI;YOSHIKAWA KUNYOSHI;NARUGE KYOMI
分类号
H01L21/8247;H01L27/10;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
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