Capicitor Using Binary Metal Electrode, Semiconductor Device Having The Capacitor And Method of Fabricating The Same

摘要

A capacitor includes a first electrode having a conductive pattern and an anti-oxidation pattern contacting the conductive pattern and a second electrode overlapping the first electrode. The capacitor further includes a capacitor dielectric layer disposed between the first and second electrodes, and having a blanket dielectric layer and a partial dielectric layer. The blanket dielectric layer is disposed between the first and second electrodes, and the partial dielectric layer is disposed between the blanket dielectric layer and the anti-oxidation pattern.