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摘要
申请公布号
JP2949852(B2)
申请公布日期
1999.09.20
申请号
JP19900404713
申请日期
1990.12.21
申请人
FUJITSU KK
发明人
SUZUKI TOSHA
分类号
C23C16/44;C23C16/455;C23F4/00;H01L21/205;H01L21/285;H01L21/302;H01L21/3065;(IPC1-7):C23C16/44;H01L21/306
主分类号
C23C16/44
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