发明名称 METHOD OF FABRICATING OPTICAL NONLINEAR THIN FILM WAVEGUIDE AND OPTICAL NONLINEAR THIN FILM WAVEGUIDE
摘要 <p>A Ge-added SiO2 thin film (12) is formed on a glass substrate (10), and a metal film (14) is formed thereon (S11 to S13). By etching the metal film (14), a pair of electrodes (14a, 14b) mutually opposed at a predetermined interval is formed (S14). An insulating thin film (16) is formed on the insulating film (12) and the electrodes (14a, 14b) (S15). While applying ultraviolet radiation, a high voltage is applied between the electrodes (14a, 14b) to perform ultraviolet excitement polling to impart an optical nonlinearity to a channel region (18) (S16). By controlling the voltage application to the channel region (18) having the optical nonlinearity, the light transmitted through the channel region (18) is controlled. Thus, an optical nonlinear waveguide for propagating single mode light is formed on a glass substrate.</p>
申请公布号 WO1999046632(P1) 申请公布日期 1999.09.16
申请号 JP1999000788 申请日期 1999.02.23
申请人 发明人
分类号 主分类号
代理机构 代理人
主权项
地址