SCANNING ELECTRON MICROSCOPE

摘要

A scanning electron microscope using a retarding-field formation technique and still capable of high-efficient separation and detection of secondary electrons. The scanning electron microscope comprises an electron source, a converging lens for converging a primary electron beam emitted from the electron source, a detector for detecting electrons derived from the irradiation of a sample with the converged primary electron beam, first retarding means for slowing down the primary electron beam directed to the sample, second retarding means for slowing down the electrons emitted from the sample, and a deflector for directing the electrons from the second retarding means toward the detector.