LIGHT SOURCE USING DIELECTRIC BARRIER DISCHARGE LAMP, AND POWER SUPPLY

摘要

A dielectric barrier discharge lamp apparatus comprises a high-voltage A.C. power supply for an electrode that cooperates with discharge gas and an interleaving dielectric to produce an excimer by dielectric barrier discharge. The voltage waveform applied to the lamp includes a slow-varying period of time before reaching the firing potential toward another discharge after one complete discharge. The following condition is satisfied: 0.3 yx< x< = VB-VA, and DELTA V>y< = VF-VA.VA : the voltage at the end of one discharge, VB : the voltage at the end of the next discharge, and VF : the voltage at the end of the slow-varying period.