Visualization method for surface characteristics of micro object e.g. for microelectronics, micro chemistry, micro optics or micro mechanics

摘要

The spatial visualization method uses a raster scanning microscope (1) for providing 2-dimensional partial images of the micro object which are represented on a monitor screen, with variation of the position of the electron beam (2) directed onto the micro object between successive partial images and corresponding adjustment of a liquid crystal light control disc (15) in front of the screen, so that each partial image can only be viewed from the corresponding observation angle. An Independent claim for a device for visualization of the surface characteristics of a micro object is also included.