| 摘要 |
A gas leakage detector, semiconductor manufacturing equipment and a method including the same are provided to reduce a manufacturing cost by adjusting the flowing of gas using Bernoulli's theorem without an inner pump. A gas leakage detector includes an injector(130), a gas chromatograph column(116), and a detector(120). The injector implemented in a fore line receives gas exhausted from a vacuum pump through the fore line and exhausts the gas through the fore line when the gas is exhausted by the vacuum pump from a process chamber to the fore line. The gas chromatograph column receives the gas, analyzes gas components from the gas, and exhausts the gas to the injector. The detector detects leakage of a specific gas by receiving information about the gas components from the gas chromatograph column.
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