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发明名称
PROCESS FOR NITRIDING SILICON-CONTAINING MATERIALS
摘要
申请公布号
EP0540689(B1)
申请公布日期
1999.09.15
申请号
EP19910915729
申请日期
1991.07.23
申请人
EATON CORPORATION
发明人
EDLER, JAMES, P.
分类号
C01B21/068;C04B35/591;(IPC1-7):C04B35/591;C01B21/06
主分类号
C01B21/068
代理机构
代理人
主权项
地址
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