COLLIMATOR SPUTTERING AND DEVICE THEREFOR,申请号KR19960002638-传众专利搜索

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发明名称	COLLIMATOR SPUTTERING AND DEVICE THEREFOR
摘要
申请公布号	KR100221348(B1)	申请公布日期	1999.09.15
申请号	KR19960002638	申请日期	1996.02.03
申请人	NIPPON ELECTRIC K.K.	发明人	SHINMURA, TOSHIKI
分类号	C23C14/04;C23C14/35;H01L21/768;(IPC1-7):C23C14/38	主分类号	C23C14/04
代理机构		代理人
主权项
地址

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