SUBSTRATE SPIN TREATING METHOD AND APPARATUS,申请号KR19960047443-传众专利搜索

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发明名称	SUBSTRATE SPIN TREATING METHOD AND APPARATUS
摘要
申请公布号	KR100221699(B1)	申请公布日期	1999.09.15
申请号	KR19960047443	申请日期	1996.10.22
申请人	DAINIPPON SCREEN SEIJO K.K	发明人	OKUDA, SEIICHIROU;SKIMOTO, KENJI;YOSII, HIROSHI
分类号	B05C11/08;H01L21/00;(IPC1-7):H01L21/027	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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