发明名称 MASS SPECTROMETER FOR TRACE GAS LEAK DETECTION WITH SUPPRESSION OF UNDESIRED IONS.
摘要 Mass spectrometers for trace gas leak detection and methods for operating mass spectrometers are provided. The mass spectrometer includes an ion source to ionize trace gases, such as helium, a magnet to deflect the ions and a detector to detect the deflected ions. The ion source includes an electron source, such a filament. The method includes operating the electron source at an electron accelerating potential relative to an ionization chamber sufficient to ionize the trace gas but insufficient to form undesired ions, such as triply charged carbon.
申请公布号 MX2008010498(A) 申请公布日期 2008.10.17
申请号 MX20080010498 申请日期 2007.02.08
申请人 VARIAN, INC. 发明人 J. DANIEL GEIST;JEFFREY DIEP;PETER WILLIAMS;CHARLES W. PERKINS
分类号 H01J49/14 主分类号 H01J49/14
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