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发明名称
A CLEANING METHOD FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100220952(B1)
申请公布日期
1999.09.15
申请号
KR19960073686
申请日期
1996.12.27
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
PARK, CHANG SEO
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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