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发明名称
Method for preparing monosilanes
摘要
申请公布号
EP0861844(A3)
申请公布日期
1999.09.15
申请号
EP19980301412
申请日期
1998.02.26
申请人
SHIN-ETSU CHEMICAL CO., LTD.
发明人
TSUKUNO, AKIHITO;SATOH, YUKINORI;MARUYAMA, MASAO;HARADA, KESAJI,;TANAKA, SHOICHI;FURUYA, MASAAKI
分类号
B01J31/02;C07B61/00;C07F7/12;C07F7/16;(IPC1-7):C07F7/12
主分类号
B01J31/02
代理机构
代理人
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