Servo control method and servo control system for feed drive system

摘要

Letting a differential value of a command value of a position command to a position control loop be an input variable, a feed forward compensation value is calculated depending on the input variable and a combination of a proper vibration frequency and an attenuation constant of a vibration in a moving direction of a moving mechanism to be set in a parameter setting manner, and a feed forward compensation is effected for the command value of the position command to the position control loop by the feed forward compensation value.