发明名称 |
Spatial light modulator with improved light shield |
摘要 |
A spatial light modulator (10) having a micromechanical active portion (12) encompassed by a light shield (14). The light shield (14) is fabricated upon a substrate (36) and has a plurality of openings (72, and 80) to permit underlying layers of photoresist (90, 92) to be undercut from beneath the light shield. Removal of the photoresist layers provides a sufficiently flat light shield, and eliminates the possibility that particles from the photoresist layer could migrate to beneath active micromirrors (30) of the spatial light modulator (12).
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申请公布号 |
US5953153(A) |
申请公布日期 |
1999.09.14 |
申请号 |
US19970958018 |
申请日期 |
1997.10.27 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
CONNER, JAMES L.;OVERLAUR, MICHAEL J.;CLARK, JEFFREY W.;GROLLER, HERMAN A. |
分类号 |
G02B26/08;(IPC1-7):G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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