A device for transmission image detection for use in a lithographic projection apparatus and a method for determining third order distortions of a patterning device and/or a projection system of such a lithographic apparatus.

摘要

Embodiments of the invention relate to a device for transmission image detection for use in a lithographic projection apparatus. In an embodiment, the device includes an array of gratings and an array of radiation sensitive sensors, each of which is arranged to receive radiation coming through one of the gratings. The array of radiation sensitive sensors may be a 1-dimensional diode array.