| 摘要 |
An apparatus for testing a semiconductor IC, comprises electronic circuits in a number corresponding to the number of terminals of a memory to be tested. The electronic circuits each comprise a set of a waveform generator, a strobing pulse generator, and a logic comparator, the electronic circuit being a CMOS type LSI, wherein logic operation circuits in a semiconductor chip constituting a LSI and thermal control circuits are paired. The power consumption of the thermal control circuits is regulated by the output operation frequency of each of the logic operation circuits, the sum of the heating value of each of the logic operation circuits and the heating value of the thermal control circuits paired with the logic operation circuits are made constant, permitting timing accuracy to be stabilized independently of test frequency and test pattern. |
