发明名称 LASER BEAM CONTROL METHOD OF LASER PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To process plural processing points at high throughput by controlling a laser beam on a straight line, where the processing points are arranged, at a creeping speed against the processing points arranged in line, and carrying out an intermittent on-off control. SOLUTION: When the distance between cutting points continuing sequentially is small, cutting point data CUT are transferred to a data processing unit 11 to be in a creeping speed mode for transferring an X scanner 101 or a Y scanner 102 at a creeping speed. In this case, a cutting order control device 31 drives the X scanner 101 (or the Y scanner 102) at creeping speed by sequentially changing coordinate data of one axis, namely an X axis (or a Y axis) in a condition that the data of the other, namely a Y axis (or a Y axis) are fixed, so as to scan the laser beam on a processing point at creeping speed. The laser beam is not positioned at every point, but the beams are continuously scanned for carrying out on-the-fly processing. Further, the scanner is moved at high speed between processing points other than the above-mentioned condition so as to carry out processing after positioning. The processing can be performed at high throughput by controlling like above.
申请公布号 JPH11245061(A) 申请公布日期 1999.09.14
申请号 JP19980355634 申请日期 1998.12.15
申请人 NIKON CORP 发明人 NEI MASAHIRO;HOSOI KEIICHI
分类号 B23K26/00;B23K26/04;B23K26/08;H01S3/00;(IPC1-7):B23K26/00 主分类号 B23K26/00
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