| 摘要 |
PROBLEM TO BE SOLVED: To increase positioning accuracy by performing highly accurate driving. SOLUTION: A first slider 3 provided in a first base 1 so as to be freely moved linearly is driven by a ball screw 6, and a base 15 is provided in the first slider 3 so as to be moved in the same direction integrally with the same. Also, a second slider 17 is provided in the second base 15 so as to be freely moved linearly in the same direction as that of the first slider 3, and a belt is provided in the second base 15 so as to be traveled following the movement of the same to drive the second slider 17. |
