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发明名称
摘要
申请公布号
JP2948256(B2)
申请公布日期
1999.09.13
申请号
JP19900070665
申请日期
1990.03.20
申请人
FUJITSU KK;FUJITSU UI ERU ESU AI KK
发明人
KAJITA TATSUYA;OGAWA KAZUKI
分类号
H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L21/824
主分类号
H01L21/8247
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