METHOD AND SLURRY FOR TUNING LOW-K VERSUS COPPER REMOVAL RATES DURING CHEMICAL MECHANICAL POLISHING,申请号KR20070135483-传众专利搜索

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发明名称	METHOD AND SLURRY FOR TUNING LOW-K VERSUS COPPER REMOVAL RATES DURING CHEMICAL MECHANICAL POLISHING
摘要
申请公布号	KR100917955(B1)	申请公布日期	2009.09.21
申请号	KR20070135483	申请日期	2007.12.21
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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