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发明名称
摘要
申请公布号	JP2947054(B2)	申请公布日期	1999.09.13
申请号	JP19940060221	申请日期	1994.03.04
申请人	YAMAHA KK	发明人	KUWAJIMA TETSUYA
分类号	H01L21/3205;H01L21/768;H01L23/522;(IPC1-7):H01L21/768	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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