Device for contact-free gripping and holding of object, especially semiconductor disks

摘要

The device (1) enables contact-free picking up and holding of an object (2). The device has several individual gripping and holding surfaces (10) associated with a surface section (20) of the object. The device also has a device (3) for generating a gas film (30) on each gripping and holding surface by means of a current outlet opening (11) formed in the surface. This outputs gas under pressure. A gas inlet opening (12) in the surface sucks gas in by means of a vacuum. The object surface section is held suspended in the gas film. In at least one of the individual grip and hold elements (10), are at least two outlet openings each to output pressurised gas on to the surface, and at least one inlet opening.