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发明名称
TROCKENENTWICKELBARER POSITIVRESIST
摘要
申请公布号
DE59506534(D1)
申请公布日期
1999.09.09
申请号
DE19955006534
申请日期
1995.05.11
申请人
SIEMENS AG
发明人
SEZI, RECAI;LEUSCHNER, RAINER;BORNDOERFER, HORST;RISSEL, EVA-MARIA;SEBALD, MICHAEL;AHNE, HELLMUT;BIRKLE, SIEGFRIED;KUEHN, EBERHARD
分类号
G03F7/038;(IPC1-7):G03F7/038
主分类号
G03F7/038
代理机构
代理人
主权项
地址
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