Verfahren zur Herstellung und Polierung eines flaches Diamantfilmes,申请号DE19956009564T-传众专利搜索

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发明名称	Verfahren zur Herstellung und Polierung eines flaches Diamantfilmes
摘要
申请公布号	DE69509564(T2)	申请公布日期	1999.09.09
申请号	DE19956009564T	申请日期	1995.01.25
申请人	SUMITOMO ELECTRIC INDUSTRIES	发明人	IKEGAYA, AKIHIKO;TANABE, KEIICHIRO;FUJIMORI, NAOJI
分类号	C30B29/04;B24B9/16;C23C16/01;C23C16/26;C23C16/27;H01L21/205;(IPC1-7):C23C16/26	主分类号	C30B29/04
代理机构		代理人
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