Reticle with crystalline substrate and pellicle

摘要

The reticle (1) with a carrier material (10) in the form of a transparent, optically uniaxial crystal, where the principal axia (A) of the crystal is approximately perpendicular to the plane of the reticle. The pellicle is made of magnesium fluoride crystal. The illumination system of the exposure installation provides a polarized light (20, PL, PR).