PLASMA ETCH REACTOR AND METHOD OF OPERATING IT,申请号EP19970907537-传众专利搜索

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发明名称	PLASMA ETCH REACTOR AND METHOD OF OPERATING IT
摘要
申请公布号	EP0939972(A1)	申请公布日期	1999.09.08
申请号	EP19970907537	申请日期	1997.01.23
申请人	TEGAL CORPORATION	发明人	DEORNELLAS, STEPHEN, P.;JERDE, LESLIE, G.;COFER, ALFERD;VAIL, ROBERT, C.;OLSON, KURT, A.
分类号	H01J37/32;H05H1/46;C23F4/00;H01L21/02;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/302	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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