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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH11243070(A)
申请公布日期
1999.09.07
申请号
JP19980045515
申请日期
1998.02.26
申请人
TOSHIBA CORP
发明人
MORITA MASAKO
分类号
H01L21/28;H01L21/285;H01L21/3205;H01L23/52;(IPC1-7):H01L21/285;H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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