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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE AND FORMATION OF CONDUCTIVE SILICON FILM
摘要
申请公布号
JPH11243065(A)
申请公布日期
1999.09.07
申请号
JP19980043455
申请日期
1998.02.25
申请人
SONY CORP
发明人
SUZUKI TOSHIHIKO
分类号
H01L21/28;H01L21/265;H01L21/8238;H01L27/092;H01L29/78;(IPC1-7):H01L21/265;H01L21/823
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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