发明名称 |
Wear-through detector for multilayered parts and methods of using same |
摘要 |
The present invention relates to wear-through detection in multilayered parts. This invention specifically encompasses, in one aspect, wear-through detection in semiconductor vacuum processing systems in which a wear indicator that will release a detectable constituent upon exposure to processing conditions is used inside the semiconductor vacuum processing tool. This invention permits real time detection of wear during operation of semiconductor vacuum processing equipment.
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申请公布号 |
US5947053(A) |
申请公布日期 |
1999.09.07 |
申请号 |
US19980005634 |
申请日期 |
1998.01.09 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
BURNHAM, JAY;LINDE, HAROLD G.;MONE, JR., NICHOLAS N.;WARREN, RONALD A. |
分类号 |
G01N17/00;(IPC1-7):G01B15/00;G01B21/08;G21K5/04;G21K5/08 |
主分类号 |
G01N17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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