发明名称 Wafer comprising optoelectronic circuits and method of verifying this wafer
摘要 A wafer (10) is described comprising several integrated optoelectronic circuits of a first type (11), such circuits of the first type each comprising electronic modules (13) and at least a first photodiode (14). Said wafer (10) is characterised in that it further comprises at least one integrated optoelectronic circuit of a second type (21) comprising electronic modules (23), at least one second photodiode (24) and at least one bonding pad (25) intended to be connected to an external measuring apparatus, said at least one bonding pad (25) being superposed onto said at least one second photodiode (24) so that said at least one circuit (21) of the second type may be used as a circuit for verifying the manufacturing of said wafer.
申请公布号 US5949129(A) 申请公布日期 1999.09.07
申请号 US19980025286 申请日期 1998.02.16
申请人 EM MICROELECTRONIC-MARIN SA 发明人 GRANDJEAN, ANDRE;KUNZ, PASCAL
分类号 H01L21/66;G01R31/28;H01L27/14;(IPC1-7):H01L21/66;G02B6/12;H01L23/48;H01L33/00 主分类号 H01L21/66
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