X-ray analyzing apparatus and x-ray irradiation angle setting method

摘要

An X-ray analyzing apparatus includes an X-ray tube, a monochromator crystal for making an X-ray monochromic, a slit, a moving table for supporting a product to be tested such as a semiconductor wafer, a detector for detecting the intensity of the X-ray beam, a table controller for setting a three-dimensional position and an angle of the moving table, and another detector for detecting scattered X-rays or fluorescent X-rays from the test product. A slit is provided so as to be vertically movable between the test product and the detector and to define a pass position of the X-ray beam which enters the detector. Thus, an X-ray irradiation angle to the test product can be set quickly and at high precision.