Suspended monolithic microwave integrated circuit and method of manufacture

摘要

A MMIC for providing a suspended transmission medium, comprising a MMIC chip, an upper ground plane overlying and spaced from critical circuitry and a lower ground plane underlying and spaced from the critical circuitry. The upper and lower ground planes are spaced from the critical circuitry at electrically similar distances. The portion of the MMIC chip that has the critical circuitry is suspended over a recess in the housing floor.