| 摘要 |
The position of an oblique mirror structure inside a polymer waveguide in relation to an optical device is accurately defined by using an integrated mask of metal, which is defined using photolithography, on top of the waveguide structure. When irradiating the surface of the waveguide with laser light, it is only let through where no metal is left, so that the recess formed is defined by edges of strips of the metal layer. In the same metal layer also electrical contact pads are produced used for self-aligning flip-chip mounting of devices such as lasers and photodiodes. Another metal layer can be applied inside the waveguide structure at a place under the waveguide core so that it is hit by and stops the laser light. The energy of the laser light will atomize the metal and the dispersed metal will then be deposited on the walls of the recess. |
