发明名称 OBSERVING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide optimum lighting with high contrast, when an object which is to be observed is lit at a large incident angle through no objective lens. SOLUTION: The light from a light-emitting part is projected on an object 3a which is to be observed with no objective lens 11, and the light reflected on the object 3a is photo-detected at a photo-detecting part for observing the object 3a. The light-emitting part comprises first and second light-emitting bodies 41 and 42, and optical axes e and f of the light-emitting bodies are allocated on the same plane or near it. The optical axis e of the first light-emitting body is allocated almost vertical to an array direction d of the object 2a while the optical axis f of the second light-emitting body 42 is inclined by an angleβ(=45 deg.) against the array direction d of the object 3a.
申请公布号 JPH11242002(A) 申请公布日期 1999.09.07
申请号 JP19980060667 申请日期 1998.02.25
申请人 LINTEC CORP 发明人 KUROKAWA HIDEJI;KOBAYASHI KENJI
分类号 G01N21/88;G01N21/956;H01L21/02;(IPC1-7):G01N21/88 主分类号 G01N21/88
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