OXIDE-FILM ETCHING METHOD,申请号JP19980349853-传众专利搜索

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发明名称	OXIDE-FILM ETCHING METHOD
摘要
申请公布号	JPH11243084(A)	申请公布日期	1999.09.07
申请号	JP19980349853	申请日期	1998.12.09
申请人	LG SEMICON CO LTD	发明人	ZE HYON PARK
分类号	H01L21/28;H01L21/302;H01L21/3065;H01L21/31;H01L21/311;H01L21/336;H01L29/78;(IPC1-7):H01L21/306	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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