| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor film forming device, wherein an photovoltaic element of high photoelectric conversion efficiency at low cost, as well as of superior mass productivity, is provided. SOLUTION: This semiconductor film forming device is for forming a semiconductor film on a substrate and comprises a means 310 for guiding a material gas through a gas purifier, a means for causing glow discharge with an electrode 309 provided in a chamber and a substrate, and a exhausting means 314 which enables evacuation of the chamber during the process. |
