发明名称 |
FLOW GUIDE DEVICE FOR DUAL-ELECTRODE DISCHARGE CAVITY, DISCHARGE CAVITY APPLYING SAME, AND EXCIMER LASER |
摘要 |
The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser. |
申请公布号 |
EP2924818(A4) |
申请公布日期 |
2016.07.20 |
申请号 |
EP20130856276 |
申请日期 |
2013.02.07 |
申请人 |
ACADEMY OF OPTO-ELECTRONICS CHINESE ACADEMY OF SCIENCES |
发明人 |
LIU, BIN;DING, JINBIN;WANG, KUIBO;WANG, YU;ZHOU, YI;ZHAO, JIANGSHAN |
分类号 |
H01S3/036;H01S3/03;H01S3/038;H01S3/07;H01S3/097;H01S3/0971;H01S3/225;H01S3/23 |
主分类号 |
H01S3/036 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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