| 发明名称 |
Mars optical modulators |
| 摘要 |
The specification describes a double poly Mechanical Anti-Reflection Switch (MARS) device in which shorting between the lower poly metallization and the silicon substrate is prevented by providing an insulating layer on the surface of the silicon substrate.
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| 申请公布号 |
US5949571(A) |
申请公布日期 |
1999.09.07 |
| 申请号 |
US19980126352 |
申请日期 |
1998.07.30 |
| 申请人 |
LUCENT TECHNOLOGIES |
发明人 |
GOOSSEN, KEITH WAYNE;WALKER, JAMES ALBERT |
| 分类号 |
G02B26/00;G02B26/02;(IPC1-7):G02B26/08 |
主分类号 |
G02B26/00 |
| 代理机构 |
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