发明名称 PRESSURE SENSOR, METHOD OF MANUFACTURING PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS AND MOVING BODY
摘要 PROBLEM TO BE SOLVED: To provide a pressure sensor in which air bubbles have difficulty to come into contact with a pressure receiving surface of a diaphragm and lowering of pressure detection accuracy can be reduced, and also to provide a method of manufacturing this pressure sensor, an altimeter equipped with this pressure sensor, an electronic apparatus and a moving body.SOLUTION: A pressure sensor 1 includes a pressure sensor element 3 having a pressure receiving surface 541, and a filling material 9 arranged surrounding the pressure sensor element 3. Moreover, the filling material 9 has a first portion 91 in contact with at least the pressure receiving surface 541 and a second portion 92 located around the first portion 91. Then, the hardening ratio of the first portion 91 becomes higher than that of the second portion 92.SELECTED DRAWING: Figure 1
申请公布号 JP2016133398(A) 申请公布日期 2016.07.25
申请号 JP20150008246 申请日期 2015.01.20
申请人 SEIKO EPSON CORP 发明人 NAKAJIMA SATOSHI
分类号 G01L9/00;G01L19/14;H01L29/84 主分类号 G01L9/00
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